A tuning fork gyroscope with drive-sense orthogonal thin-walled holes for high sensitivity

A tuning fork gyroscope (TFG) with orthogonal thin-walled round holes in the driving and sensing directions is proposed to improve sensitivity. The thin walls formed by through produce stress concentration, transforming small displacement of vibration into a large concentrated strain. When piezoelectric excitation or detection carried out here, output voltage can be increased, thereby improving Besides, quadrature coupling suppressed because make optimal positions different planes. finite element method used verify benefits holes, parameters are optimized for better performance. experimental results show that sensitivity prototype frequency 890.68 Hz 100.32 mV/(°/s) under open-loop detection, rotation rate resolved at least 0.016 (°/s)/Hz, which about 6.7 times than conventional TFG. In addition, error reduced 2.7 times. has simple structure, high reliability, effectively improves sensitivity, helpful guide optimization gyroscopes derived MEMS gyroscopes.